- Stanford Center of Integrated Design Infrastructure Upgrade -
Construction Cost: $6 million
$6 million NSF funded infrastructure and energy retrofit project for the 150,000 sq.ft. semiconductor research lab, which consists of a 12,000 sq.ft. Class 100 and Class 1000 nanofabrication facility. The infrastructure program includes converting a shop space into a Nanosynthesis lab, solvent exhaust system upgrade, process cooling water system upgrade, replacing of toxic gas monitoring and alarm system, toxic gas distributions system upgrade, HEPA filter replacement, humidification system upgrade, electrical power distribution system upgrade, abatement system upgrade. A number of potential energy conservation measures, including clean room air flow reduction by air sampling, VAV optimization controls, high capacity HEPA filtration, and ultrasonic humidification, were evaluated by energy modeling using E-quest and life cycle cost performance. The recommended measrues were implemented and are currently under construction as a separate project managed by the University’s Sustainability and Energy Management Office.